International Conference on Extreme Ultraviolet Lithography 2021

Small scale, big impact: the world's thinnest carbon nanotube membrane

SPIE EUV Lithography Digital Forum will address the worldwide status of EUV technology and infrastructure readiness. Each year, scientists, engineers and industry leaders come together to discuss current research, hear the latest breakthroughs, share company announcements and connect with colleagues.

Canatu’s CTO Ilkka Varjos will join the forum to talk about the world’s thinnest and strongest free-standing CNT membranes as a key enabler of  high-volume semiconductor manufacturing.

The global semiconductor market is growing rapidly. The growth is driven by advancements in IoT, automotive and 5G requiring faster chips that use less power. EUV lithography is a giant leap forward, yet defects in printing remain among the greatest constraints to EUV technology uptake. Silicon is reaching its physical limits too, calling for new material innovations to keep Moore’s Law on track. 

Canatu CNB membrane is the world’s thinnest and strongest free-standing CNT membrane. It is a random network with a very small pore size, capable of filtering particles down to the nanoscale.

Despite being less than 20nm thin, the CNB membrane is exceptionally strong because of the high aspect ratio of the individual CNB tubes. Thanks to unique dry process, Canatu can make longer a cleaner tubes, enabling better performance in the end application. A single CNB tube is only 1 – 2 nanometres thick (100,000 times thinner than a sheet of paper), yet they can be more than 10 micrometres long, which makes CNB membranes thin and durable to endure industrial handling and processing.

Thanks to very small interaction cross-section of carbon, free-standing CNB membranes have extremely good optical properties, unequaled by any other material.  CNB membranes feature extraordinary high light transmission (>97%T at EUV / X-Ray) and low light scattering; essential e.g. in high-volume semiconductor manufacturing where CNB membranes are used as EUV pellicles to protect the photomask from defects while allowing maximum light passage, enhancing precision, shorten processing, and increasing production efficiency on the wafer by ~25%.

Free-standing CNB membranes also have very high heat resistance. Depending on the environment, the CNB membranes can tolerate up to 1500°C without breaking or decomposing. Another unique ability of the CNB membrane is their very low pressure drop when the flow rate increases. Due to this high tolerance to mechanical and air pressure pulses, CNB membranes are ideal for extreme environments found in vacuum applications.

We look forward to seeing you online.

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About Canatu
Canatu is a high-tech CNT material developer pioneering the future of automotive, consumer electronics and semiconductor industries with the proprietary breakthrough technology called Carbon NanoBud (CNB), a hybrid of carbon nanotubes and fullerenes. Everything Canatu does revolves around the CNB, which as a network features truly remarkable properties making CNB attractive for an ever-expanding range of applications. Our current product portfolio ranges from automotive ADAS heaters to capacitive touch sensors to EUV pellicles and more, and we are continuously on the lookout for exciting new applications to add further value with our material and expertise. We are headquartered in Vantaa, Finland with sales offices in the US, Japan and Taiwan.