Free-standing CNT membrane
For semiconductor manufacturing
Transforming products for better tomorrows with nano carbon
Canatu has deep understanding on how CNT behaves, and long experience in modifying CNT structures to unleash the full potential of carbon – the most versatile material in the universe.
Download technical paper to learn what’s unique about Canatu carbon nanotubes, how the CNT network structure can be modified, what are free-standing CNT membranes and their properties, and how Canatu is applying this technology to enhance precision and throughput in high-volume semiconductor manufacturing.
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© (2021) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only. The paper was initially published in the SPIE Digital Library as proceedings of SPIE Photomask Technology + EUV Lithography 2021 conference. https://doi.org/10.1117/12.2599072