Small scale, big impact: exceptionally thin and durable free-standing CNB membrane

The global semiconductor market is growing rapidly. The growth is driven by advancements in IoT, automotive and 5G requiring faster chips that use less power. EUV lithography is a giant leap forward, yet defects in printing remain the greatest constraint to EUV lithography uptake. Silicon is reaching its physical limits too, calling for new material innovations to keep Moore’s Law on track.

The biggest impact can be made on the smallest scale. Canatu pioneers the future of semiconductor manufacturing with its proprietary breakthrough technology called Carbon NanoBud (CNB), a hybrid carbon nanomaterial combining nanotubes with fullerenes. Everything Canatu does revolves around CNBs which, as a network, feature truly remarkable mechanical, optical, and electrical properties.

Particle filtration down to the nanoscale

CNB membranes are exceptionally thin but strong free-standing membranes with no substrate support. It is a random network with a very small pore size, capable of filtering particles down to the nanoscale. Despite being less than 20 nm thin, the CNB membranes are extraordinary strong because of the high aspect ratio of the individual CNB tubes. A single CNB tube is only 1-2 nanometers thin (100,000 times thinner than a sheet of paper), yet they can be more than 10 micrometers long which makes CNB membranes thin but robust to endure industrial handling and processing.

High light transmission

Thanks to the very small interaction cross-section of carbon, CNB membranes provide extremely good optical properties, unequaled by any other material. CNB membranes feature  high light transmission (>97%T at EUV / X-Ray) and low light scattering, and they also have high heat resistance of up to 1500°C without breaking or decomposing.

Such membranes benefit a broad spectrum of semiconductor and space applications where high light transmission, durability and high heat tolerance are critical. These applications range from EUV pellicles to X-Ray windows to optical filters and beyond.

Unique deposition process

Canatu has developed a unique dry process for synthesizing and depositing CNBs which eliminates compromising wet dispersion steps traditionally used to make carbon nanotube membranes. This enables  Canatu to create longer, cleaner and virtually defect-free tubes ensuring better performance in the end application. The material and process are also highly tunable. Canatu has means to synthesize single-walled, double-walled and multi-walled tubes. The level of bundling and network density of these tubes can be also controlled to match the application-specific requirements. Finally, this highly tailorable morphology can be conformally coated with organic or inorganic coatings in case the transmission of the visible light needs to be eliminated, or the carbon needs to be passivated against certain chemistries.

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About Canatu
Canatu is a high-tech material company pioneering the future of automotive, consumer electronics and semiconductor industries with the proprietary breakthrough technology called Carbon NanoBud (CNB), which is a hybrid of carbon nanotubes and fullerenes. Everything Canatu does revolves around CNB, which as a network features truly remarkable properties making CNB attractive for an ever-expanding range of applications. Our current product portfolio spans from automotive ADAS heaters to capacitive touch sensors to EUV pellicles and more, and we are continuously on the lookout for exciting new applications where we can add more value with our material and expertise. We are headquartered in Finland with sales offices in the US, Japan and Taiwan. www.canatu.com