Membrane
The Canatu membrane is the world’s thinnest and strongest free-standing CNT membrane. It is comprised of a random network with very small pore size, capable of filtering particles down to the nanoscale.
Unique membrane properties
Canatu’s carbon nanotube membrane is the world’s thinnest and strongest CNT membrane, exhibiting high transmittance (>97%T at EUV/X-ray), low flare and high thermal stability (>1500°C).
Membrane made with Canatu carbon nanotubes have extraordinary mechanical, thermal and optical properties, making them ideal for extreme conditions, such as EUV pellicles in the semiconductor industry and X-ray windows in space applications.
High transmission
The Canatu membrane provides exceptional optical properties that are unequaled by any other material. This membrane features extraordinarily high light transmission (>97%T at EUV / X-Ray) and low light scattering. These features are critical especially in EUV lithography where the CNT membrane can be used as an EUV pellicle to prevent defects from ever landing on the wafer while allowing maximum light passage.
High heat resistivity
The Canatu membrane has high heat resistivity. Depending on the environment, free-standing CNT membranes can tolerate up to 1500°C without breaking or decomposing. CNT membranes have much higher heat resistivity compared to quartz which breaks at 1200°C, or polyimide which decomposes at below 520°C.
Download technical paper
Download SPIE Photomask + EUV Lithography conference proceedings to learn more about the versatility of Canatu CNT, the unique dry deposition process, common variations and application potentials for the CNT membrane.
Download technical paper
EUV Pellicles
EUV pellicles are membranes used to protect the photomask from contamination while permitting high EUV transmission. EUV pellicles made of Canatu CNT offer unique benefits unparalleled by other materials.
Another unique quality of the Canatu membrane is its low pressure drop when flow rate increases. Due to its high tolerance to mechanical and air pressure pulses, Canatu membranes can thrive even in extreme environments.
These properties collectively allow Canatu CNT membranes to be used in semiconductor and space applications where high optical transmission, durability and high heat tolerance are critical.
Mass production of CNT membrane
Since 2021, Canatu has been mass producing CNT membrane used in the semiconductor industry. Canatu’s manufacturing platform produces high-quality, membranes in various sizes, shapes, and carbon nanotube structures. This gives Canatu the ability to adjust the membrane properties to best meet the end application needs, and to quickly scale up to mass production from the initial prototyping phase. Canatu also has competences to modify the carbon nanotube structure properties further through chemical functionalization or coating.
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