Free-standing CNT membranes

Canatu CNT membrane is the world’s thinnest and strongest free-standing CNT membrane. It is comprised of a random network with very small pore size, capable of filtering particles down to the nanoscale.

Record-breaking free-standing CNT membranes

Canatu’s free-standing CNT membranes are the world’s thinnest and strongest CNT membranes, exhibiting high transmittance (>97%T at EUV/X-ray) and high heat resistivity (>1500°C).

Their remarkable optical, mechanical, electrical and thermal properties make them suitable for demanding applications, such as EUV pellicles in the semiconductor industry and X-ray windows in space applications.

Canatu CNT carbon nanotubes optical properties 1280x870

High transmission

Free-standing CNT membranes provide exceptional optical properties that are unequaled by any other material. CNT membranes feature extraordinarily high light transmission (>97%T at EUV / X-Ray) and low light scattering. These features are critical especially in EUV lithography where the CNT membrane can be used as an EUV pellicle to prevent defects from ever landing on the wafer while allowing maximum light passage.

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Canatu CNT carbon nanotubes thermal properties 1280x870

High heat resistivity

Free-standing CNT membranes have high heat resistivity. Depending on the environment, free-standing CNT membranes can tolerate up to 1500°C without breaking or decomposing. CNT membranes have much higher heat resistivity compared to quartz which breaks at 1200°C, or polyimide which decomposes at below 520°C.

Download technical paper

Download SPIE Photomask + EUV Lithography conference proceedings to learn more about the versatility of Canatu CNT, the unique dry deposition process, common variations and application potentials for the free-standing CNT membranes.

EUV Pellicles

EUV pellicles are membranes used to protect the photomask from contamination while permitting high EUV transmission. EUV pellicles made of Canatu CNT offer unique benefits unparalleled by other materials.

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Another unique quality of Canatu CNT membrane is their low pressure drop when flow rate increases. Due to its high tolerance to mechanical and air pressure pulses, Canatu CNT membranes can thrive even in extreme environments.

These properties collectively allow Canatu CNT membranes to be used in semiconductor and space applications where high optical transmission, durability and high heat tolerance are critical.

Mass production of free-standing CNT membranes

Since 2021, Canatu has been mass producing free-standing CNT membranes used in the semiconductor industry. Canatu’s manufacturing platform produces high-quality, free-standing CNT membranes in various sizes, shapes, and carbon nanotube structures. This gives Canatu the ability to adjust the free-standing CNT membrane properties to best meet the end application needs, and to quickly scale up to mass production from the initial prototyping phase. Canatu also has competences to modify the carbon nanotube structure properties further through chemical functionalization or coating.

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Canatu CNT variants

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Canatu carbon nanotubes CNT transistors vs silicon 1280x870
Future developments

The discovery of new things is deep in Canatu’s DNA. From the beginning, we have explored uncharted territory with curiosity. While our experts solve the issues of today, they are also working on what’s to come. To future developments.