Canatu presented membranes at SEMICON Europa
During the Executive Forum on Materials Innovation at SEMICON Europa 2023 Emma Salmi, Head of Synthesis, presented ‘Canatu carbon nanotube membranes as a versatile material platform for EUV lithography.’ She highlighted the benefits of our unique carbon nanotube manufacturing process, emphasized the expertise gained from mass-producing EUV membranes since 2021, and elaborated on the customization of these membranes for diverse applications such as EUV pellicles, debris filters and optical filters, highlighting remarkable versatility they offer.
Attendees gained insights into the benefits of Canatu’s floating catalyst chemical vapor deposition (FC-CVP) process using dry deposition method, which yields long and pristine carbon nanotubes enabling better performance in the end applications. High control over the synthesis allows tailoring of carbon nanotube network density, bundle size, tube diameter, and wall count. The direct fabrication method with tailorable morphology combined with the exceptional mechanical and thermal properties of carbon nanotubes provides a versatile platform technology, which can be further modified with post process steps such as purification to remove metal impurities. Canatu’s carbon nanotube membranes are used e.g. in EUV pellicles.
Emma Salmi is a senior nanomaterials engineer at Canatu. She has been spearheading the development of free-standing carbon nanotube membranes with primary focus on the FCCVD synthesis and early processing steps for optimum pellicle manufacturing for two years. Her background encompasses nanotechnology, thin film deposition systems and carbon nanomaterials with 15 years of industrial and academic experience. She has 37 peer-reviewed publications, conference papers and patents.
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Canatu is a carbon nanomaterial developer creating the most advanced carbon nanotubes for industry-transforming products. The Canatu carbon nanotube (CNT) technology has been created with a unique process that ensures the required versatility and reliability for highly engineered solutions. Canatu partners with forerunner companies, together transforming products for better tomorrows with nano carbon. The company’s focus is in the semiconductor and automotive industries with technology for electrochemical sensing developing fast. The experts at Canatu think big and create impacts on the tiniest scale – nano solutions for massive impact. Canatu’s headquarters are in Finland with sales offices also in the US, Japan and Taiwan.
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