SEMICON Japan

Canatu, a fast-growing deep technology company creating advanced carbon nanotubes (Canatu CNT), will exhibit at the SEMICON Japan from December 11-13, 2024 in Tokyo Big Sight, Japan. Visit us at booth #7419 in East Hall 7 to explore the latest samples and to discuss how Canatu can enable the next step in semiconductor performance.

Presentation

Join Chief Sales Officer, Samuli Kohonen for his presentation “CNT Membranes for EUV Processes – A Versatile Material Platform” on Wednesday, December 11, from 11:00 to 11:20 a.m. in East Hall 5.

The presentation will cover:

• Introduction to Canatu: Overview of Canatu, a fast-growing deep technology company specializing in creating advanced carbon nanotubes (Canatu CNT), CNT products, and CNT reactors for the semiconductor, automotive, and medical diagnostics industries.
• Dry Deposition^TM Process: Explanation of the Dry Deposition™ process — the core of the technology platform, which sets us apart by enabling us to produce high-purity, strong CNTs with a unique combination of properties that can be tailored to application-specific needs.
• Canatu’s Semiconductor Products: Focus on Canatu CNT membranes, which can be used in pre- and post-lithography exposure processes to enhance quality control, and as CNT membrane pellicles to increase productivity. 

Booth highlights 

At booth #7419 in East Hall 7, Canatu will showcase carbon nanotube membranes for extreme ultraviolet (EUV) processes.

Canatu CNT membranes are known for their unique combination of properties, featuring high EUV/X-Ray transmittance (>97%), high thermal resistance (>1500°C), and high mechanical strength.

These CNT membranes can be used in pre- and post-lithography exposure processes to enhance quality control. Canatu has mass-produced inspection membranes for the semiconductor industry since 2021.

Canatu’s CNT membranes can also serve as CNT membrane pellicles, offering higher transmittance and better performance compared to traditional materials. Canatu CNT membrane pellicles support productivity increase potential in EUVL process by up to 7-15% due to higher EUV light transmittance.

Additionally, CNT membranes can function as optical filters, selectively blocking unwanted particles, electrons, and photons while filtering specific wavelengths.

Welcome to visit Canatu booth #7419 in East Hall 7 to explore our latest samples!