EUV and X-ray filters
Canatu optical filters for EUV and X-ray block short-wavelength photons and high-energy particles that can interfere with the measurement process, while providing high EUV and X-ray transmittance.
Optical filters improving measurement precision in EUV process monitoring
Coated CNT membranes can be used as EUV and X-ray filters across demanding applications. They selectively block unwanted particles, electrons, and photons, such as DUV, VIS, and IR radiation, while providing high EUV and X-ray transmittance. To meet specific requirements, customized coating layers can be applied to target specific wavelengths. These ultra-thin, free-standing CNT membranes can be supported by metallic or all-carbon mesh structures to enhance mechanical durability. Designed for high-vacuum and differential-pressure environments, Canatu’s optical filters for EUV and X-ray enable reliable operation in the most challenging conditions.
- Ultra-thin band-pass filter fabricated onto a desired frame, coated or non-coated
- High EUV and X-ray transmittance while selectively blocking UV, DUV, visible, and infrared radiation
- Free-standing membrane or supported with all-carbon mesh for improved EUV or X-ray spectral purity
- Exhibits high mechanical strength and durability
- Compatible with high-vacuum and differential pressure environments
- Exceptional thermal stability and chemically inert
EUV and X-ray optical filter applications
Canatu’s band-pass filters for X-ray and EUV can support many different applications including EUV mask inspection, X-ray astronomy, microscopy, e-beam filtration, and more.
Key features
Canatu’s ultra-thin optical filters offer high EUV and X-ray transmittance, ensuring precise imaging and measurement procedures. CNT filters exhibit high thermal stability and chemical inertness, enabling reliable performance under extreme heat and reactive environments. Additionally, they are mechanically robust, capable of endure mechanical stress such as differential pressure and vibration.
Download technical paper
Download SPIE Astronomical Telescopes + Instrumentation 2022 proceedings “Carbon nanotubes thin filters for x-ray detectors in space.”
Download technical paper
Authors: Marco Barbera, Ugo Lo Cicero, Luisa Sciortino, Michela Todaro, Elena Puccio, Fabio D’Anca, Nicola Montinaro, Salvatore Varisco, Pekka Törmä, Lauri Riuttanen, Ilkka Varjos, Bjorn Mikladal, Elena Magnano, Igor Pis, Christian Gollwitzer, Evelyn Handick, Michael Krumrey, Christian Laubis.
Proc. SPIE 12181, Space Telescopes and Instrumentation 2022: Ultraviolet to Gamma Ray, 121814H (31 August 2022); doi: 10.1117/12.2631516
Collaborating with ESA
Since 2020, Canatu has partnered with the European Space Agency (ESA) to develop an X-ray filter for the ATHENA telescope, allowing precise celestial imaging by enabling X-rays to pass through while blocking other wavelengths. Traditionally, X-ray filters use metal meshes for mechanical support due to their fragility. Canatu has introduced a novel all-carbon support structure in partnership with Ametek Finland Ltd. and the University of Palermo, replacing the traditional metal mesh and enhancing X-ray transmittance.
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Leveraging versatile platform technology for EUV filters and X-ray filters
Canatu membranes serve as a versatile platform technology for a wide range of EUV and X-ray optical filter applications. Within Canatu’s product portfolio, you will find an array of cutting-edge solutions such as EUV pellicles, debris filters, and optical filters tailored to different needs.
These membranes are created from Canatu CNT, renowned for its exceptional purity and properties. Canatu CNTs are synthesized in a floating catalyst chemical vapor deposition (FC-CVD) reactor, and then dry-deposited onto an open frame or a border. With more than a decade of experience in large-scale production of CNTs, Canatu excels in controlling the process and tailoring CNTs for different uses.
All-carbon mesh
A novel mesh structure manufactured from Canatu CNTs provides an alternative to conventional metal meshes. This semi-transparent carbon mesh can be fabricated in practically any size, shape, or thickness, and can be attached to any frame provided.
- Enhanced mechanical properties
- Excellent film-to-mesh adhesion
- Stops film tear propagation after puncture
- A wide range of shapes and dimensions to minimize EUV transmittance loss
- Retains spectral purity in EUV and X-ray applications
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